Semiconductor
The constant pressure for improved price-performance of semiconductors requires the industry to quickly adopt technologies that can drive efficiency. KEYENCE's precision sensors provide innovative solutions for inspecting workpieces and monitoring equipment, to help our customers deliver the highest quality components at competitive prices. Check out some of the proven solutions below.
Detecting wafer notch position with a 2D laser profiler eliminates the risk of missing the notch when the wafer is slightly warped.
2D/3D Laser Profiler
LJ-X8000 series
By monitoring the home position of the end effector, you can detect minute changes before they cause a collision between the wafer and wafer carrier. Using a long range displacement sensor enables end effector position measurement through a viewport.
Ultra High-Speed/High-Accuracy Laser Displacement Sensor
LK-G5000 series
Measure the profile of a wafer edge. By selecting one of the inspection tools such as Height Difference/Width or Angle, users can start measurement easily. The high-resolution image capturing using 3200 points/profile achieves highly accurate profile measurement that was impossible with conventional methods.
2D/3D Laser Profiler
LJ-X8000 series
Highly glossy grooves can be difficult to inspect using non-contact measuring instruments due to diffuse reflections and other factors. The LJ-X Series, however, includes unique functions that can suppress such effects for stable shape measurement.
2D/3D Laser Profiler
LJ-X8000 series
